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Search for "CF4 plasma" in Full Text gives 5 result(s) in Beilstein Journal of Nanotechnology.

Metal-free catalysis based on nitrogen-doped carbon nanomaterials: a photoelectron spectroscopy point of view

  • Mattia Scardamaglia and
  • Carla Bittencourt

Beilstein J. Nanotechnol. 2018, 9, 2015–2031, doi:10.3762/bjnano.9.191

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  • higher kinetic energies, the cross section for vacancy creation decreases and more complex defect configurations are created, such as di-vacancies and distortions (Figure 5) [83][86][87]. The effect of different ion kinetic energies on supported graphene has been highlighted in the case of CF4 plasma
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Published 18 Jul 2018

Fluorination of vertically aligned carbon nanotubes: from CF4 plasma chemistry to surface functionalization

  • Claudia Struzzi,
  • Mattia Scardamaglia,
  • Jean-François Colomer,
  • Alberto Verdini,
  • Luca Floreano,
  • Rony Snyders and
  • Carla Bittencourt

Beilstein J. Nanotechnol. 2017, 8, 1723–1733, doi:10.3762/bjnano.8.173

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  • , Belgium CNR-IOM, Laboratorio Nazionale TASC, I-34149 Trieste, Italy Materia Nova Research Center, 7000 Mons, Belgium 10.3762/bjnano.8.173 Abstract The surface chemistry of plasma fluorinated vertically aligned carbon nanotubes (vCNT) is correlated to the CF4 plasma chemical composition. The results
  • investigate the evolution of the electronic properties as a function of the fluorine content at the vCNT surface. The samples suffer a limited ageing effect, with a small loss of fluorine functionalities after two weeks in ambient conditions. Keywords: carbon nanotubes; CF4 plasma; fluorination; plasma
  • chemistry; surface chemistry; Introduction Tetrafluoromethane (CF4) plasma emerged as a strategic tool when exploiting the ability of CFx radicals to promote etching of a variety of substrates frequently used in the manufacturing of microelectronic devices [1]. In the CF4 plasma, CFx radicals are primarily
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Published 21 Aug 2017

Effect of the fluorination technique on the surface-fluorination patterning of double-walled carbon nanotubes

  • Lyubov G. Bulusheva,
  • Yuliya V. Fedoseeva,
  • Emmanuel Flahaut,
  • Jérémy Rio,
  • Christopher P. Ewels,
  • Victor O. Koroteev,
  • Gregory Van Lier,
  • Denis V. Vyalikh and
  • Alexander V. Okotrub

Beilstein J. Nanotechnol. 2017, 8, 1688–1698, doi:10.3762/bjnano.8.169

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  • . It is proposed that fluorination with F2 and BrF3 produces small fully fluorinated areas and short fluorinated chains, respectively, while the treatment with CF4 plasma results in various attached species, including single or paired fluorine atoms and –CF3 groups. The results demonstrate a
  • points in this scientific field at present [11]. There are several ways to fluorinate CNTs, the most common being fluorination using F2 gas [12], CF4 plasma [13], and BrF3 vapor [14]. For all of these methods, the parameters preserving the tubular structure of the nanotubes after the fluorination have
  • fluorine to the DWCNT shells. The ratio of integral intensities of D band to G band (ID/IG) progressively grows in a sequence of the fluorination techniques (CF4 plasma < BrF3 gas < F2 gas), which can be attributed to an increase of the fluorine loading. In the low-frequency region (100–400 cm−1) the Raman
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Published 15 Aug 2017

Electrical properties and mechanical stability of anchoring groups for single-molecule electronics

  • Riccardo Frisenda,
  • Simge Tarkuç,
  • Elena Galán,
  • Mickael L. Perrin,
  • Rienk Eelkema,
  • Ferdinand C. Grozema and
  • Herre S. J. van der Zant

Beilstein J. Nanotechnol. 2015, 6, 1558–1567, doi:10.3762/bjnano.6.159

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  • consists of a fine-polished, 500 μm thick, phosphorous bronze sheet coated with 6 μm of insulating polyimide. A gold wire, with a 50 nm wide constriction in the middle, is fabricated on top of the polyimide with standard electron beam lithography, evaporation and lift-off techniques. After a final O2/CF4
  • plasma etching step, performed to suspend the central constriction, the sample is mounted in a three-point bending mechanism and electrically contacted. By bending the substrate with a pushing rod controlled by a stepper motor or a piezoelectric element, the gold wire can be broken thereby forming two
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Published 17 Jul 2015

Functionalization of vertically aligned carbon nanotubes

  • Eloise Van Hooijdonk,
  • Carla Bittencourt,
  • Rony Snyders and
  • Jean-François Colomer

Beilstein J. Nanotechnol. 2013, 4, 129–152, doi:10.3762/bjnano.4.14

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  • . Chung et al. extended it to aligned MWCNTs samples [87]. The proposed solution consists of a layer-by-layer deposition method, involving alternately the deposition of a thin layer of carbon nanotubes and the exposure of its surface to a CF4 plasma. The advantage of these combined techniques is the
  • performed by Zhu et al. (Figure 8) [88]. They exposed VA-CNTs films to CF4 plasma and evaluated the dependence of the field-emission properties on the exposure time. Results highlighted an optimal exposure time of two minutes, giving the higher field emission current, as well as a modification of the
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Published 22 Feb 2013
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